展示会情報
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- 口頭発表
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- ブース番号:未定
- 題目:Demonstration of MOCVD system with advanced mass production performance
- 題目:Demonstration of AlScN Growth Using Commercial-Grade MOCVD Equipment Compatible with Low Vapor Pressure Precursor Supply
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- 口頭発表
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- ブース番号:未定
- 題目:Growth of Si-doped β-Ga2O3 thick layers by low-pressure hot-wall MOVPE using tetramethylsilane as a doping gas
- 発表日:未定