History of TAIYO NIPPON SANSO Corporation (TNSC)'s R&D activity of metal-organic vapor phase epitaxy (MOVPE) since its start at 1983 has been following the evolution of Japanese compound-semiconductor industry during this period. TAIYO NIPPON SANSO Corporation has developed a specific application technology of high purity specialty gas such as AsH3, PH3 and NH3, as well as MOCVD equipment for laser diode (LD) for compact disc, electron device for mobile phone and blue light emitting diode (LED), etc., accordingly to the evolution of these devices. TNSC has also commercialized an abatement system that can treat high-volume exhaust gas from these applications.